film thickness uniformity meaning in Chinese
膜厚均匀性
Examples
- Finite element method and matlab methods are used to simulate the film thickness uniformity . a rotating plane holder is discussed . the influencing parameters of film thickness uniformity , and the method of adjusting the parameters are studied
在分析均匀性的过程中,引入了有限元的思想,利用有限元法ansys和matlab相结合,模拟计算了旋转平面夹具的膜厚均匀性,分析了均匀性的影响因素,指出了工艺中的调整方法。